Robust Control of an Electrostatic Microelectromechanical Actuator
نویسندگان
چکیده
منابع مشابه
Robust Control of an Electrostatic Microelectromechanical Actuator
A continuing trend these days is the use of micro-electro-mechanical actuators with electronic circuitry to fabricate MEMS devices such as micro-switches, hard disks, optical micro-mirrors ... One of the problems with the electrostatic MEMS actuator is that when an electrical voltage is applied to these devices, the micro-actuators undergo a residual vibration before reaching their permanent po...
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ژورنال
عنوان ژورنال: The Open Mechanics Journal
سال: 2008
ISSN: 1874-1584
DOI: 10.2174/1874158400802010012